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説明
E-beam Lithography system構成
構成なしOEMモデルの説明
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.ドキュメント
ドキュメントなし
RAITH
e-LiNE
カテゴリ
Lithography
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
97741
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
E-beam Lithography system構成
構成なしOEMモデルの説明
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.ドキュメント
ドキュメントなし