説明
Electron beam lithography (EBL) system構成
Known issues: Interferometer stage laser and chiller reportedly down 50 kV eWrite column technology 50 MHz pattern generator Fixed-beam-moving-stage (FBMS traxx) / modulated-beam-moving-stage (MBMS periodixx) lithography Replacement parts quoted on 9/28/2026: He-Ne laser module SL02/R2, SIOS laser source, TÜV-conform service part High-voltage power supply G603-78, v02 PSU HiTeK, exchange basis LX1 water-cooled chiller, 230 V, LX1-W2AG3T3D-O-AL-6, Haskris P/N FG24447 DENKA cathode Type Module C2 for eWrite column Copper gun head seal, Lesker P/N GA-0600 Agilent TwisTorr 304 FS turbopump, ISO 100, water cooling, flange 20761 and inlet screen TT304 onboard controller, 24 VDC, programmed to address 2, open frequency range SysPSU-X5_ChTMPctrl-MainsOEMモデルの説明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.ドキュメント
ドキュメントなし
RAITH
VOYAGER
カテゴリ
Lithography
最終検証： 5日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
137373
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Electron beam lithography (EBL) system構成
Known issues: Interferometer stage laser and chiller reportedly down 50 kV eWrite column technology 50 MHz pattern generator Fixed-beam-moving-stage (FBMS traxx) / modulated-beam-moving-stage (MBMS periodixx) lithography Replacement parts quoted on 9/28/2026: He-Ne laser module SL02/R2, SIOS laser source, TÜV-conform service part High-voltage power supply G603-78, v02 PSU HiTeK, exchange basis LX1 water-cooled chiller, 230 V, LX1-W2AG3T3D-O-AL-6, Haskris P/N FG24447 DENKA cathode Type Module C2 for eWrite column Copper gun head seal, Lesker P/N GA-0600 Agilent TwisTorr 304 FS turbopump, ISO 100, water cooling, flange 20761 and inlet screen TT304 onboard controller, 24 VDC, programmed to address 2, open frequency range SysPSU-X5_ChTMPctrl-MainsOEMモデルの説明
The VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.ドキュメント
ドキュメントなし