The KARL SUSS MA6/BA6 is a Mask Aligners system. The MA6/BA6 can be used with 6"/150mm wafer sizes.

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

SUSS MicroTec / KARL SUSS

MA6/BA6

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- UV400 split field Optics (for 365nm and 405nm exposure)
- CIC 500 Power Supply
- Capable of Hard, Soft, Vacuum Contact  with proper tooling.
- 1500W Lamphouse
- Vibration Isolation Table (for Suss MA6)
- 150mm Chuck included
- 7x7 Maskholder included
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner

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SUSS MicroTec / KARL SUSS MA6 with Backside Alignment

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Vintage 2008 
Condition prior to de-installation - Operational



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MA6/BA6

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