説明
- UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Maskholder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask Aligner構成
- Topside (TSA) Alignment - Backside (BSA) Alignment - Suss DVM6 Microscope Objectives: - UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Mask holder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEMモデルの説明
The KARL SUSS MA6/BA6 is a Mask Aligners system. The MA6/BA6 can be used with 6"/150mm wafer sizes.ドキュメント
ドキュメントなし
SUSS MicroTec / KARL SUSS
MA6/BA6
検証済み
カテゴリ
Mask/Bond Aligners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
53530
ウェーハサイズ：
6"/150mm
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
SUSS MicroTec / KARL SUSS
MA6/BA6
カテゴリ
Mask/Bond Aligners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
53530
ウェーハサイズ：
6"/150mm
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
- UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Maskholder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask Aligner構成
- Topside (TSA) Alignment - Backside (BSA) Alignment - Suss DVM6 Microscope Objectives: - UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Mask holder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEMモデルの説明
The KARL SUSS MA6/BA6 is a Mask Aligners system. The MA6/BA6 can be used with 6"/150mm wafer sizes.ドキュメント
ドキュメントなし