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説明
説明なし構成
Standard Features 1) Semi Auto System Auto Leveling and Z axis Stage motion - Manual loading ,Unloading & Alignment 2) PC & PLC Control (Midas Application Operating System). 3) Sample size : up to 6” wafer 4) Mask size : up to 7” x 7” 5) Wafer Stage : X,Y,Z and Theta 4 Axis motion (Motorized Z & Theta Axis) 6) Auto leveling of mask and sample 7) Dual CCD zoom microscope and 20” LCD Monitor 8) Anti-Vibration Table 9) Dimension(mm) :1256mm*1151mm*1600mm[W*D*H] System Specification Light source module - UV light source : 350nm to 450nm - 365nm Intensity : 20~35 mW/cm2 - Max. Beam Size : 6.25” x 6.25” Beam Uniformity : ±3%(6”wafer) Top side Microscope Module - Dual zoom microscope - Manual moving stage : Dual X, Y, Z Axis - Moving Distance Objective separation : 50 ~ 150mm Y-Axis : ± 20mm - Magnification: 2x ~ 10x (monitor: 90x ~ 500x)* 2x lens: 4x ~ 20x - W.D.: 34mm - 20” LCD Monitor Stage and Controller Module - Stage Moving Distance X, Y Axis : About ±5mm Z Axis : About 10 mm Theta Axis: About 5 degrees - Stage Resolution X, Y Stage Resolution: 0.1㎛ Z Axis : 0.1 ~ 100㎛ - Z and Theta Axis motorized motion - Z-Axis Alignment Gap: 0 ~ 100㎛ - Alignment accuracy: 1.0um Resolution - Vacuum Contact : 1um ( Thin PR@Si Wafer ) - Hard Contact : 2um - Soft contact : 3um - Proximity : 5um Utility requirement 1) Dimension(mm) : 1256 x 1151 x 1600 [W*D*H] 2) Electric Power : 220Vac / 15A / Single Phase 3) N2 : More than 4kg/cm2 ( 50 psi ), Flow rate 5 Liter/min Out side diameter 6 mm PU Tube 4) Air : More than 6kg/cm2 ( 80 psi ), Flow rate 10 Liter/min Out side diameter 6 mm Tube 5) Vacuum: ≥ 600mmHg, ( Vacuum pump include ) 6) Exhaust: No Required 7) N2 Consumption -13~17 Liter/min For Process (Stage : 1 Liter/min , Lamp House : 12~16 Liter/min) 8) Weight :Equipment : 500 kg OPTIONS 1. Double-side Alignment Module (CCD CEMERA TYPE) - Lens Magnification : 5X - Lens Resolution 2.76um ( @WD25mm) - F.O.V. : 0.655 x 0.49 mm - Dual X,Y,Z Motorizing Mode - Image Grab & Saving - Dual CCD Camera Module - Alignment Accuracy : BSA : < ±1.0 umOEMモデルの説明
提供なしドキュメント
MIDAS
MDA-600S
カテゴリ
Mask/Bond Aligners
最終検証： 60日以上前
主なアイテムの詳細
状態：
New
稼働ステータス:
不明
製品ID：
45769
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
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