The SEN CORPORATION / SUMITOMO NV-8200P is a new medium-current implant system from Eaton-SEN. It addresses the need for ultrashallow implants for device manufacturers working with 0.5-micron geometries and below. The system uses a source common with previous generations of Eaton implanters, but has a new design that focuses on reducing contamination.

In 2000, Eaton spun off Axcelis as a separate company, and Axcelis inherited Eaton’s 50-percent ownership stake in the joint venture. SEN, licenses technology from Axcelis for ion implantation, has exclusive rights to the territory of Japan and is the leading producer of ion implantation equipment in Japan. In 2009, the merger between Axcelis Technologies and Sumitomo Heavy Industries dissolved—Sumitomo became the sole parent company, and with this, the company name changed to SEN Corporation. 

NV 8200P

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