説明
説明なし構成
NV-8250HT - 250KeV • Number of Cassettes : 02 • Loading Configuration : SMIF • Original Ship Date from OEM : 16/10/2001 • Software Version : 5.1.3 User ID: EES • Sun SPARCStation Version : Ultra Work Station • SPC Productivity Software • Auto Startup and Computer Monitoring • Electrical Requirements : 208V / 100A • GEM/SECS Interface • SECS II Interface Wafer Handling o Automatic Flat or Notch Alignment Capability w/buffer cassette o Programmable flat orient o Wafer Rotation o Slot-to-Slot Wafer Integrity o Programmable Auto Tilt : 0-60 deg o ESC o Fast Maintenance Kit Machine Configuration o Remote Monitor o Single Stage Extraction : 15-40kV Ion Source Type : ELS o Source Material Type : Moly o Vaporizer : Dual o NV-8250 Energy Filter System o NV-8250 Target Positioning/Scanning System o Parallel Beam Using Hybrid Scanning o Signal Tower : No o On-Board Cryos o Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer Gas Configuration Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid Support Equipment • Cyro Compressors: Qty 1 CTI-9600 • Vacuum Pumps: Qty 1 Pfeiffer • Remote Disk Chiller: Qty 1Affinity • Scrubber: CS Clean CS195SCOEMモデルの説明
200mm high tilt and medium current applications for all chips.ドキュメント
ドキュメントなし
SEN CORPORATION / SUMITOMO
NV 8250HT
検証済み
カテゴリ
Medium Current
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
16281
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示SEN CORPORATION / SUMITOMO
NV 8250HT
検証済み
カテゴリ
Medium Current
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
16281
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
NV-8250HT - 250KeV • Number of Cassettes : 02 • Loading Configuration : SMIF • Original Ship Date from OEM : 16/10/2001 • Software Version : 5.1.3 User ID: EES • Sun SPARCStation Version : Ultra Work Station • SPC Productivity Software • Auto Startup and Computer Monitoring • Electrical Requirements : 208V / 100A • GEM/SECS Interface • SECS II Interface Wafer Handling o Automatic Flat or Notch Alignment Capability w/buffer cassette o Programmable flat orient o Wafer Rotation o Slot-to-Slot Wafer Integrity o Programmable Auto Tilt : 0-60 deg o ESC o Fast Maintenance Kit Machine Configuration o Remote Monitor o Single Stage Extraction : 15-40kV Ion Source Type : ELS o Source Material Type : Moly o Vaporizer : Dual o NV-8250 Energy Filter System o NV-8250 Target Positioning/Scanning System o Parallel Beam Using Hybrid Scanning o Signal Tower : No o On-Board Cryos o Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer Gas Configuration Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid Support Equipment • Cyro Compressors: Qty 1 CTI-9600 • Vacuum Pumps: Qty 1 Pfeiffer • Remote Disk Chiller: Qty 1Affinity • Scrubber: CS Clean CS195SCOEMモデルの説明
200mm high tilt and medium current applications for all chips.ドキュメント
ドキュメントなし