説明
説明なし構成
Tool is currently still in production. Tool is in good condition. Inspect to confirm configuration and condition. <b>NV-8250HT-250KeV</b> Wafer Size (inches) : 8 Number of Cassettes : 02 Loading Configuration : SMIF Software Version : 5.1.3 User ID: EES Password: anything Sun SPARCStation Version : Ultra Work Station SPC Productivity Software Auto Startup and Computer Monitoring Electrical Requirements : 208V / 100A GEM/SECS Interface : Yes SECS II Interface : Yes <b>Wafer Handling </b> Automatic Flat or Notch Alignment Capability w/buffer cassette Programmable flat orient Wafer Rotation Slot-to-Slot Wafer Integrity Programmable Auto Tilt : 0-60 deg ESC Fast Maintenance Kit <b>Machine Configuration </b> Remote Monitor Single Stage Extraction : 15-40kV Ion Source Type : ELS Source Material Type : Moly Vaporizer : Dual NV-8250 Energy Filter System : NV-8250 Target Positioning/Scanning System Signal Tower : No On-Board Cryos Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer <b>Gas Configuration</b> Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid <b>Suppor Equipment</b> Cyro Compressors Manufacturer/Model : CTI-9600 QTY : 1 Vacuum Pumps Pump Type : Dry Model : Pfeiffer QTY : 1 Remote Disk Chiller Mfg and Model : Affinity QTY : Manufacturer/Model : CS Clean Model : CS195DCOEMモデルの説明
200mm high tilt and medium current applications for all chips.ドキュメント
ドキュメントなし
SEN CORPORATION / SUMITOMO
NV 8250HT
検証済み
カテゴリ
Medium Current
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21113
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEN CORPORATION / SUMITOMO
NV 8250HT
検証済み
カテゴリ
Medium Current
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21113
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Tool is currently still in production. Tool is in good condition. Inspect to confirm configuration and condition. <b>NV-8250HT-250KeV</b> Wafer Size (inches) : 8 Number of Cassettes : 02 Loading Configuration : SMIF Software Version : 5.1.3 User ID: EES Password: anything Sun SPARCStation Version : Ultra Work Station SPC Productivity Software Auto Startup and Computer Monitoring Electrical Requirements : 208V / 100A GEM/SECS Interface : Yes SECS II Interface : Yes <b>Wafer Handling </b> Automatic Flat or Notch Alignment Capability w/buffer cassette Programmable flat orient Wafer Rotation Slot-to-Slot Wafer Integrity Programmable Auto Tilt : 0-60 deg ESC Fast Maintenance Kit <b>Machine Configuration </b> Remote Monitor Single Stage Extraction : 15-40kV Ion Source Type : ELS Source Material Type : Moly Vaporizer : Dual NV-8250 Energy Filter System : NV-8250 Target Positioning/Scanning System Signal Tower : No On-Board Cryos Beamline and Source Pumps Source Pump : Pfeiffer Beam Line Pump : Pfeiffer End Station Pump : Pfeiffer <b>Gas Configuration</b> Gas Type MFC Type and Model BF3 UNIT-1662 SDS PH3 UNIT-1662 SDS AsH3 UNIT-1662 SDS InCl3 UNIT-1662 Solid <b>Suppor Equipment</b> Cyro Compressors Manufacturer/Model : CTI-9600 QTY : 1 Vacuum Pumps Pump Type : Dry Model : Pfeiffer QTY : 1 Remote Disk Chiller Mfg and Model : Affinity QTY : Manufacturer/Model : CS Clean Model : CS195DCOEMモデルの説明
200mm high tilt and medium current applications for all chips.ドキュメント
ドキュメントなし