概要（Overview）

The AMAT VIISTA 810XE (formerly Varian VIISTA 810XE) is part of a single wafer ion implanter series. The VIISta 810XE is a highly productive medium current ion implanter that operates within the energy range of 2keV to 810keV, with an optional range of 2keV to 900keV. It is considered the industry standard for its maximum throughput of over 400 wafers per hour, precise doping with a patented dose control system, and unmatched contamination control with a unique dual magnet beamline.