概要（Overview）

The NanoSpec 3000 film thickness measurement system is a state of the art, small spot spectroscopic reflectometer, built on a simple to use tabletop platform. A modern solid state linear diode array reflectometer is used to insure measurement speed and accuracy. The NanoSpec 3000 provides scanning from 480 to 800nm and can measure single-layer films such as oxide, nitride and photoresist, as well as multiple layer film stacks. Measurements can also be made on a \vide variety of other substrates including silicon, aluminum and gallium arsenide.