Quantox® is a metrology system designed to measure the electrical performance of gate dielectric films in integrated circuits. The quality of the gate dielectric is crucial for the speed and reliability of the circuit. By measuring key parameters such as contamination levels and oxide thickness, Quantox® helps to control the gate dielectric process and maximize device yield. The system is non-contact, ensuring accurate and reliable measurements.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

QUANTOX

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