概要（Overview）

The Zeta-20 is the industry’s first optical profilometer to use ZDot™, a patented technique that combines structured-illumination, confocal optics to generate high-resolution, 3D surface topography data and a True Color image of the surface. This technique enables users to easily focus on any transparent or opaque surface, for fast measurements of step heights and roughness. Multi-mode optics expand the capability of the non-contact 3D surface profiler by combining ZDot with white light interferometry, shearing interferometry, a reflectometer for transparent thin-films, and automated defect inspection.