説明
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.構成
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
N & K
1700RT
検証済み
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
66004
ウェーハサイズ：
不明
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
N & K
1700RT
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
66004
ウェーハサイズ：
不明
ヴィンテージ：
2005
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.構成
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. Spotsize: R = 50um, T < 400um with manual loading. The n&k 1700-RT is designed for handling 5” or 6” square masks.OEMモデルの説明
提供なしドキュメント
ドキュメントなし