説明
N&K 5700 CDRT Metrology system Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.構成
Working potsize: R = 50um, T < 400um The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks. The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.OEMモデルの説明
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N & K
5700 CDRT
検証済み
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66006
ウェーハサイズ：
不明
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
N & K
5700 CDRT
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66006
ウェーハサイズ：
不明
ヴィンテージ：
2006
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
N&K 5700 CDRT Metrology system Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.構成
Working potsize: R = 50um, T < 400um The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks. The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.OEMモデルの説明
提供なしドキュメント
ドキュメントなし