NOVA

The NovaScan 2040 and 3060 have an overall measurement time of 13 seconds per wafer for 13 sites, compatible with all high-throughput polishers, enabling measurement and mapping of all wafers both pre- and post-polish without affecting the polisher’s throughput. Nova is the only Integrated Metrology provider to offer both wet and dry integrations allowing customers to choose the best alternative. The NovaScan 2040/3060 utilizes UV Spectrophotometry to accurately measure and map the most advanced applications in the semiconductor industry down to the 0.09µm technology node.

NOVA

NOVASCAN 2040

Metrology

同様のリスト

NOVASCAN 2040

Metrology

同様のリスト