The SEMILAB FAaST 200 SL is a Wafer Mask Inspection system. The FAaST 200 SL can produce wafer size of 8” and Measurements can be made in scribe line test sites or in the active cell area. Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues

SEMILAB

FAAST 200 SL

Non-contact electrical C-V & I-V measurement system capable of measuring on product wafers.
Measurements can be made in scribe line test sites or in the active cell area.
Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues.
Major applications include measurements of SiO2, Nitrided Oxides, advanced high-K and low-K dielectrics

FAAST 200 SL

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