
説明
Wafer / Reticle inspection .15um particle detection / bare silicon構成
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEMモデルの説明
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.ドキュメント
ドキュメントなし
カテゴリ
Metrology
最終検証: 3日前
主なアイテムの詳細
状態:
New
稼働ステータス:
Installed / Running
製品ID:
153188
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
カテゴリ
Metrology
最終検証: 3日前
主なアイテムの詳細
状態:
New
稼働ステータス:
Installed / Running
製品ID:
153188
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Wafer / Reticle inspection .15um particle detection / bare silicon構成
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEMモデルの説明
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.ドキュメント
ドキュメントなし