説明
説明なし構成
Manually loading Photoresist Spin CoaterOEMモデルの説明
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.ドキュメント
ドキュメントなし
SOLITEC
5110C
検証済み
カテゴリ
Metrology
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
56476
ウェーハサイズ：
不明
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SOLITEC
5110C
カテゴリ
Metrology
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
56476
ウェーハサイズ：
不明
ヴィンテージ：
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Manually loading Photoresist Spin CoaterOEMモデルの説明
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.ドキュメント
ドキュメントなし