説明

The NWL-860 series provides a full range of macro inspection capabilities—one of the features considered most essential for inspecting semiconductor patterns with progressively higher steps and ever-increasing layers. A single cassette wafer loader capable of handling 8- and 6-inch (200 and 150 mm) wafers, this series of wafer loaders not only comes standard with pattern side macro inspection capability, but also with the ability to perform back side periphery and center macro inspections as well.