概要（Overview）

Long 1000 x 800 mm stage stroke provides maximum performance in the measurement of large-size workpieces such as FPD devices. Printing masks for substrates. Mother substrates for PCBs. Shadow masks. FPD devices. Long stage stroke enables measurements of LCD substrates/modules and large-size PCBs. Laser AF also enables measurements of height gaps and warping in workpieces. Search function enables measurements of lands and holes of PCBs. Variety of illumination choices facilitate accurate edge detection even for vague geometries. High-speed stage and high-speed image processing provide high throughput.