説明
説明なし構成
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEMモデルの説明
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductorsドキュメント
ドキュメントなし
AIXTRON
6x2 CCS
検証済み
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Uncrated
製品ID：
67167
ウェーハサイズ：
不明
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AIXTRON
6x2 CCS
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Uncrated
製品ID：
67167
ウェーハサイズ：
不明
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
AIXTRON CCS for GaAs Configuration: Wafer Size: 6 x 2" 2 x 4" 1 x 6" Above throughput is possible with current tool configuration. No modifications required. MO Sources: S1 Cp2Mg – 1 S2 Cp2Mg – 2 (spare) S3 TMAl S4 TMGa – 2 S5 TMGa – 1 S6 TMIn – 1 S7 TMIn – 2 (spare) Gases: 100ppm SiH4 NH3 N2 H2 PH3 (for use if converted to III-V) AsH3 (for use if converted to III-V) Installed Parts: showerhead heater Pd cell H2 purifier Epison flow sensors on TMGa and TMIn KSA MiniMOS inisitu high resolution stress monitoring instrument Alcatel glovebox pump Ebara 825 process pump Alcatel regen pump Other Equipment: LLydel chiller for 0°C to 80°C temp control for showerhead Cleansorb SC dry bed abatement systemOEMモデルの説明
Close Coupled Showerhead 6x2 inch Deposition system for compound semiconductorsドキュメント
ドキュメントなし