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KOKUSAI-ELECTRIC (KE) DJ-1206VN-DF
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説明
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiRN) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-002 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / SiH2Cl2 / NH3 / 20%F2 / Si-Source Others: ROBO 5000
構成
Process: ALD (SiRN) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
OEMモデルの説明
提供なし
ドキュメント

ドキュメントなし

カテゴリ
MOCVD

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

72855


ウェーハサイズ:

12"/300mm


ヴィンテージ:

2010


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KOKUSAI-ELECTRIC (KE)

DJ-1206VN-DF

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検証済み
カテゴリ
MOCVD
最終検証: 60日以上前
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主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

72855


ウェーハサイズ:

12"/300mm


ヴィンテージ:

2010


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説明
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiRN) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-002 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / SiH2Cl2 / NH3 / 20%F2 / Si-Source Others: ROBO 5000
構成
Process: ALD (SiRN) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )
OEMモデルの説明
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ドキュメント

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