説明
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiRN) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-002 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / SiH2Cl2 / NH3 / 20%F2 / Si-Source Others: ROBO 5000構成
Process: ALD (SiRN) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
72855
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KOKUSAI-ELECTRIC (KE)
DJ-1206VN-DF
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
72855
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
MISSING PARTS: (1 set) Quartz wares - process tube, etc. Software OS: CX3000 Equipment status: Out of Fab Process: ALD (SiRN) Type: Diffusion Air valve: FUJIKIN Heater: D4EX24196-002 MFC, MFM: HORIBA STEC Three phase power: 3Ø AC 480V Single phase power: 1Ø AC 208V Main/APC: CKD Gas: PN2 / SiH2Cl2 / NH3 / 20%F2 / Si-Source Others: ROBO 5000構成
Process: ALD (SiRN) The furnace subsystem includes the following major components: - Automation system - Heater - Process chamber - Cooling water unit - Scavenger - Temperature controller The gas subsystem includes the following major components: - Power box ( consists of the primary power supply and the power control system ) - Gas supply unit - Exhaust - Vacuum line ( for LPCVD systems ) - Temperature controller Power box ( consists of the primary power supply and the power control system ) Rapid cooling unit ( option for Fast Thermal Processing Systems ) Pump box ( option for LPCVD systems )OEMモデルの説明
提供なしドキュメント
ドキュメントなし