説明
MET構成
OverlayOEMモデルの説明
Caliper élan is an advanced 300mm overlay control system from Nanometrics. It is the most advanced overlay metrology solution from the company, building on the foundation of the original Caliper overlay inspection tool. Élan offers a cost-effective solution for advanced IC manufacturing processes, with a refined optics head and advanced focusing and algorithms. It provides a 50% improvement in overlay measurement uncertainty and greater than 50% MAM time improvement. It is production-ready, with GEM SECS suite and Automated Material Handling System integration as standard. The SynRG option supports waferless recipe creation, using advanced image simulation methods to produce robust, production-ready recipes. Élan is compatible with 200mm or 300mm wafers and offers a variety of handler configurations.ドキュメント
ドキュメントなし
ONTO / NANOMETRICS / ACCENT / BIO-RAD
CALIPER ELAN
検証済み
カテゴリ
Overlay
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
76040
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ONTO / NANOMETRICS / ACCENT / BIO-RAD
CALIPER ELAN
カテゴリ
Overlay
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
76040
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2005
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
MET構成
OverlayOEMモデルの説明
Caliper élan is an advanced 300mm overlay control system from Nanometrics. It is the most advanced overlay metrology solution from the company, building on the foundation of the original Caliper overlay inspection tool. Élan offers a cost-effective solution for advanced IC manufacturing processes, with a refined optics head and advanced focusing and algorithms. It provides a 50% improvement in overlay measurement uncertainty and greater than 50% MAM time improvement. It is production-ready, with GEM SECS suite and Automated Material Handling System integration as standard. The SynRG option supports waferless recipe creation, using advanced image simulation methods to produce robust, production-ready recipes. Élan is compatible with 200mm or 300mm wafers and offers a variety of handler configurations.ドキュメント
ドキュメントなし