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5200XP
カテゴリ
Overlay概要（Overview）
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.
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検査、保証、鑑定、ロジスティクス
