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ARCHER 10
カテゴリ
Overlay概要（Overview）
Archer 10 is an Automated Optical Overlay Metrology product that provides control of overlay error budget for sub-0.13-micron production, increases throughput by 30%, and allows consistent measurement of low-contrast targets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.
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