説明
Defective or missing parts: Defective Part Name Linear Pulse Motor (Slider Unit) LP1: Clamp Drive Motor Finger Door Node PCB Assembly LP1: Manual Operation Switch Assembly (Operation Access Button) NRM3100SP Z-Axis Mechanism Assembly Hold-down Node PCB Robot Vacuum Solenoid Center-up Vacuum Solenoid CCD Camera Unit Missing Part Name SPS-PWR SUPPLY 575W Power Supply (PC Power Supply) 4-axis robot Wavelength selection filter (J-line) Interface board for NRM-3100 (LDSD) Node hold-down assembly (PCB) Load port Z-axis motor Linear pulse motor Arm Linear Pulse Motor HUB ATR9100 2P Failure Theta-axis motor Dock/Undock motor unit Linear pulse motor Stage X-axis Ball Screw Cover Center-up Unit構成
構成なしOEMモデルの説明
NRM-3100 overlay measurement system.ドキュメント
ドキュメントなし
同様のリスト
すべて表示
NIKON
NRM-3100
カテゴリ
Overlay
最終検証： 18日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
148669
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Defective or missing parts: Defective Part Name Linear Pulse Motor (Slider Unit) LP1: Clamp Drive Motor Finger Door Node PCB Assembly LP1: Manual Operation Switch Assembly (Operation Access Button) NRM3100SP Z-Axis Mechanism Assembly Hold-down Node PCB Robot Vacuum Solenoid Center-up Vacuum Solenoid CCD Camera Unit Missing Part Name SPS-PWR SUPPLY 575W Power Supply (PC Power Supply) 4-axis robot Wavelength selection filter (J-line) Interface board for NRM-3100 (LDSD) Node hold-down assembly (PCB) Load port Z-axis motor Linear pulse motor Arm Linear Pulse Motor HUB ATR9100 2P Failure Theta-axis motor Dock/Undock motor unit Linear pulse motor Stage X-axis Ball Screw Cover Center-up Unit構成
構成なしOEMモデルの説明
NRM-3100 overlay measurement system.ドキュメント
ドキュメントなし