説明

Genmark GPR Vacuum Elevator, ASM Part Number: 78-115406A49 ***This unit is NEW in the crate and came from ASM excess stock.*** Description: The GPR Vacuum Elevator provides accurate, HV-compatible wafer indexing in vacuum processing capital equipment. The GPR Vacuum Elevators feature Genmark Automation’s breakthrough GPR technology, allowing a tilt of up to 1.5 degrees of the lifting platform. The GPR Vacuum Elevator provides vertical indexing with 16" [406 mm] (this unit is believed to be 14.90") travel, and it is capable to lift a load of up to 50 lb. Elevator translational mechanism is isolated from the atmospheric environment by using Ferrofluidic and magnetically-coupled seals. Features: Precise, high-resolution wafer indexing Cost-effective, seamless integration with the Genmark Automation Vacuum Robots HV-compatible – up to 10-8 torr

構成

The ASM Description Is: Part Number: 78-115406A49 Description: Elevator-Vacuum-14.90 Inch Stroke, GPR Vacuum Elevator Elevator Specifications: Axes of Motion: Z1, Z2, and Z3: Platform Elevation - First Elevator E1, E2, and E3: Platform Elevation - Second Elevator Ranges of Motion: 14.90" or 16.00" (This unit is believed to be the 14.90" Version) Maximum Tilt Angle: 1.5° Position Feedback: Optical differential incremental encoders Encoder Resolution: 2500 counts/rev. (quadrupled) Position Scaling Factor for Each Axis: 0.0001" Maximum Speed: 500 x 0.01"/sec = 5"/sec Maximum Acceleration: 500 x 0.01"/se = 5"/sec General Specifications: Repeatability (Constant Temperature): ±0.001" Maximum Vacuum: 10-10 Torr Payload: 50 lbs maximum Elevator Dimensions: Body Diameter: 14.125" Body Height: 25.00" - elevator with 16.00" vertical travel, 23.10" - elevator with 14.90" vertical travel Elevator Weight: 150 lbs. Materials: Aluminum & Stainless Steel Cleanliness: Class 1 clean room compatible Controller Specifications: Number of Axes Controlled: Three axes per motion control card Control Method: Multiple single axis servo system Typical System Configuration: Single Board Computer, LS421 GPR Motion Control Card (one per elevator), Flash ROM Disk Emulator with Optoisolated RS232 port Typical Controller Computer: Processor: 486 compatible processor board Computer RAM: 16 Mbytes Controller Dimensions: 17.0" x 17.5" x 7.0" Controller Weight: 25 - 40 lbs. Interface Requirement Specifications: Minimum Host Computer Requirements: One RS-232C port (Using Macros, the host computer can be disconnected for virtual stand alone operation of the elevator.) RS-232 Requirements: Cable: Configured for DTE device or Null Modem Baud Rates Supported by the Controller: 110, 150, 300, 600, 1200, 2400, 4800, 9600 Communication Specifications: 8 bit words, 1 stop bit, no parity Elevator to Controller Cable Length: 7.5 ft, 9.0 ft, 15.0 ft, 25.0 ft Power Supply Specifications: Input Power Requirements: 100-120 or 220-240 VAC ±10%, 50-60 Hz, 600 Watts (continuous) Input Power Fuse: 6A Switch Power Supply: +5 VDC 8.0 A (peak), +12 VDC 3.0 A (peak), -12 VDC 1.0 A (peak), +60 VDC 10 A (continuous) 16 A (peak) Component Requirements: Encoders: +5 VDC Brake: +24 VDC Limit Switches: +24 VDC Motors: +60 VDC