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説明
説明なし構成
2 Chamber: PE CVDOEMモデルの説明
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.ドキュメント
ドキュメントなし
ASM
EAGLE 10
カテゴリ
PECVD
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
121141
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
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説明
説明なし構成
2 Chamber: PE CVDOEMモデルの説明
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.ドキュメント
ドキュメントなし