概要（Overview）

VERSALINE PECVD systems can deposit many different high-quality films, ensuring you get maximum, reliable high productivity at a low total cost of ownership. Process Silane-based films (a-Si, SiO2, SiNx, SiON, SiC, SiOF, a-SiC) TEOS films Stress control High and low deposition rates Tunable refractive index