説明
Dielectric Etch構成
Process: CUOX From original tool PO, please inspect to verify STANDARD SPECIFICATIONSSoftware Revision : VERSION 2.3_43FI Software: B4.3_11GEM SEC Revision: B6.10_20 Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Load Port: 3 LoadportFacility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switchFacility plate: Manual Valve : Supplied by IMI in floorFacility plate: Pressure Gauge Loader Module Corrosion Prevention: TDK Corrosion ResistantLoadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWEREMO: Front x3, Rear x4Cable Length: Monitor 1/2 cables : 15 ft/50ft Cable Length: Pump Cable : 75 ftMonitor: Monitor-1 : Flat Panel with Keyboard on STAND Monitor: Monitor-2 : Remote Flat Panel on STAND IPUP: Alcatel IPUP HARDWARE CONFIGURATIONChamber type: CT CHAMBER CONFIGURATIONProcess kits : Qt/Si Gas inject : 3.5 anodized SGDchamber O-ring: chamraz513Turbo pump: Dual Alcatel 1600RF match: DAIHEN RF generator: ENI GHW 50EPD windows: Quick remove released quartzCM Test port: 1/2 VCR&KF25 DualRGA Port: RGA port W mech valveEndpoint Type: H.O.T ENDPOINTEndpoint Wavelength 1: CO 484 NMEndpoint Wavelength 2: CN 387 NMCathode Temperature Monitor: YESESC Power Supply: CT HV POWER SUPPLYRF Feed: DIRECT CT CATHODEDry pump: EABARA-ESR80WNWall chiller: SMC-H2010Cathode chiller: SMC-INR 496-003DCoolant: HT110ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IALiner: CT LINER Gas Box ConfigurationGas Name: MFC Type-SizeC4F6: FC-PN980CR1BA-150CH2F2: FC-PN980CR1BA-50C4F8: FC-PN980CR1BA-50N2: FC-PN980CR1BA-200CHF3: FC-PN980CR1BA-100CHF3_200: FC-PN980CR1BA-200O2_30: FC-PN980CR1BA-30O2_200: FC-PN980CR1BA-200O2_2000: FC-PN980CR1BA-2000CF4: FC-PN980CR1BA-200AR_200: FC-PN980CR1BA-200AR_1500: FC-DN780C-BA-1500 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps and customer provided items not included on salesOEMモデルの説明
提供なしドキュメント
ドキュメントなし
APPLIED MATERIALS (AMAT)
CENTURA AP EMAX
検証済み
カテゴリ
Plasma Etch
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
17552
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
CENTURA AP EMAX
検証済み
カテゴリ
Plasma Etch
最終検証： 30日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
17552
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Dielectric Etch構成
Process: CUOX From original tool PO, please inspect to verify STANDARD SPECIFICATIONSSoftware Revision : VERSION 2.3_43FI Software: B4.3_11GEM SEC Revision: B6.10_20 Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Load Port: 3 LoadportFacility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switchFacility plate: Manual Valve : Supplied by IMI in floorFacility plate: Pressure Gauge Loader Module Corrosion Prevention: TDK Corrosion ResistantLoadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWEREMO: Front x3, Rear x4Cable Length: Monitor 1/2 cables : 15 ft/50ft Cable Length: Pump Cable : 75 ftMonitor: Monitor-1 : Flat Panel with Keyboard on STAND Monitor: Monitor-2 : Remote Flat Panel on STAND IPUP: Alcatel IPUP HARDWARE CONFIGURATIONChamber type: CT CHAMBER CONFIGURATIONProcess kits : Qt/Si Gas inject : 3.5 anodized SGDchamber O-ring: chamraz513Turbo pump: Dual Alcatel 1600RF match: DAIHEN RF generator: ENI GHW 50EPD windows: Quick remove released quartzCM Test port: 1/2 VCR&KF25 DualRGA Port: RGA port W mech valveEndpoint Type: H.O.T ENDPOINTEndpoint Wavelength 1: CO 484 NMEndpoint Wavelength 2: CN 387 NMCathode Temperature Monitor: YESESC Power Supply: CT HV POWER SUPPLYRF Feed: DIRECT CT CATHODEDry pump: EABARA-ESR80WNWall chiller: SMC-H2010Cathode chiller: SMC-INR 496-003DCoolant: HT110ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IALiner: CT LINER Gas Box ConfigurationGas Name: MFC Type-SizeC4F6: FC-PN980CR1BA-150CH2F2: FC-PN980CR1BA-50C4F8: FC-PN980CR1BA-50N2: FC-PN980CR1BA-200CHF3: FC-PN980CR1BA-100CHF3_200: FC-PN980CR1BA-200O2_30: FC-PN980CR1BA-30O2_200: FC-PN980CR1BA-200O2_2000: FC-PN980CR1BA-2000CF4: FC-PN980CR1BA-200AR_200: FC-PN980CR1BA-200AR_1500: FC-DN780C-BA-1500 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps and customer provided items not included on salesOEMモデルの説明
提供なしドキュメント
ドキュメントなし