説明
Missing parts: RF generator, controller, power rack, control circuit board, internal liner構成
Process Chamber: Enabler Turbo Pump: Shimadzu TMP-3403LMC WFIB: 300mm Enabler WHIB eFIB: 300mm Enabler eFIB Independent Gas Injection: Selectable between 2 gases for each stepOEMモデルの説明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. To address advanced low k etch applications, the Applied Centura Enabler Etch system performs etch, strip and clean steps in a single chamber. The Enabler’s all-in-one capability streamlines the process flow for advanced chip designs and significantly reduces operating costs. Enabler Chamber: 300mm only.ドキュメント
ドキュメントなし
APPLIED MATERIALS (AMAT)
CENTURA ENABLER ETCH
検証済み
カテゴリ
Plasma Etch
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
87568
ウェーハサイズ:
12"/300mm
ヴィンテージ:
2008
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示APPLIED MATERIALS (AMAT)
CENTURA ENABLER ETCH
検証済み
カテゴリ
Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
87568
ウェーハサイズ:
12"/300mm
ヴィンテージ:
2008
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Missing parts: RF generator, controller, power rack, control circuit board, internal liner構成
Process Chamber: Enabler Turbo Pump: Shimadzu TMP-3403LMC WFIB: 300mm Enabler WHIB eFIB: 300mm Enabler eFIB Independent Gas Injection: Selectable between 2 gases for each stepOEMモデルの説明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. To address advanced low k etch applications, the Applied Centura Enabler Etch system performs etch, strip and clean steps in a single chamber. The Enabler’s all-in-one capability streamlines the process flow for advanced chip designs and significantly reduces operating costs. Enabler Chamber: 300mm only.ドキュメント
ドキュメントなし