説明
ICP double Chmbaer構成
Process chamber(ICP) X 2 Slit door X 2 Heater block X 2 Lift Pin X 2 Top plate X 2 Robot X 1 Shuttle X 1 Cassette nest X 1 Shuttle dump X 1 Loadlock X 1 Cooling cahmebr X 1 Operator Box X 1 Temp panel X 2 Gas panel X 2 Gas box X 2 Cassdoor X 1 ARM X 1 Paddle X 2 DC BOX X 1 AC BOX X 1OEMモデルの説明
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.ドキュメント
MATTSON
ASPEN II
検証済み
カテゴリ
Plasma Etch
最終検証: 30日以上前
主なアイテムの詳細
状態:
Refurbished
稼働ステータス:
不明
製品ID:
102019
ウェーハサイズ:
4"/100mm, 6"/150mm, 8"/200mm
ヴィンテージ:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示MATTSON
ASPEN II
カテゴリ
Plasma Etch
最終検証: 30日以上前
主なアイテムの詳細
状態:
Refurbished
稼働ステータス:
不明
製品ID:
102019
ウェーハサイズ:
4"/100mm, 6"/150mm, 8"/200mm
ヴィンテージ:
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available