説明
Applications: -PECVD -Etch -Dielectric sputtering -Plasma polymer processes -Substrate biasing Benefits: -Enhances process flexibility -Improves throughput -Optimizes process control -Ensures high repeatability -Eases integration Features: -Sinusoidal RF output for low harmonic distribution -Wide operation frequency range for optimal process control -Tightly regulated output power -Low EMI/RFI -Remote operation capability Description: The PDX low-power series of mid-frequency power supplies offers a highly efficient, compact, easy-to-integrate source of power for a wide variety of process applications. These highly reliable power supplies enhance process flexibility, deliver a wide operating frequency range for optimized process control, ensure high process repeatability, and improve throughput.構成
The Unit's Serial Number Tag Reads: Part Number: 3156024-108C Serial Number: 350779 Revision: C Power Requirements: 208-230 VAC, 50/60 Hz, 1.4 kW Physical Specifications: Size: 89 mm H x 483 mm W x 483 mm D (3.5" x 19" x 20") Weight: < 14 kg (31 lb) Customer Interface: User port (no active front-panel controls) User Port Connector: 25-pin, sub-miniature D, male Serial Port Connector: None 50 W Output Connector and Load Match Output Connector: N or C Electrical Specifications: RF Output: 18 to 1250 W Frequency: 325 to 450 kHz Load Match Transformer: 10 to 350 Ω, 7 taps Internal Reactive Match: Inductor available Maximum Reflected Power: 250 W Harmonics: At full rated power, all harmonics are > 50 dB below the fundamental output frequency Input Voltage: 180 to 253 VAC, 50/60 Hz, Single Phase Input Current: 15 ARMS max Maximum Output Voltage: 300 V Maximum Output Current: 6 A Regulatory Accuracy: 1% of set point or 2 W, whichever is greater.OEMモデルの説明
low-power series of mid-frequency power suppliesドキュメント
ドキュメントなし
カテゴリ
Power Supplies
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
126431
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
ADVANCED ENERGY
PDX 1250
カテゴリ
Power Supplies
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
126431
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Applications: -PECVD -Etch -Dielectric sputtering -Plasma polymer processes -Substrate biasing Benefits: -Enhances process flexibility -Improves throughput -Optimizes process control -Ensures high repeatability -Eases integration Features: -Sinusoidal RF output for low harmonic distribution -Wide operation frequency range for optimal process control -Tightly regulated output power -Low EMI/RFI -Remote operation capability Description: The PDX low-power series of mid-frequency power supplies offers a highly efficient, compact, easy-to-integrate source of power for a wide variety of process applications. These highly reliable power supplies enhance process flexibility, deliver a wide operating frequency range for optimized process control, ensure high process repeatability, and improve throughput.構成
The Unit's Serial Number Tag Reads: Part Number: 3156024-108C Serial Number: 350779 Revision: C Power Requirements: 208-230 VAC, 50/60 Hz, 1.4 kW Physical Specifications: Size: 89 mm H x 483 mm W x 483 mm D (3.5" x 19" x 20") Weight: < 14 kg (31 lb) Customer Interface: User port (no active front-panel controls) User Port Connector: 25-pin, sub-miniature D, male Serial Port Connector: None 50 W Output Connector and Load Match Output Connector: N or C Electrical Specifications: RF Output: 18 to 1250 W Frequency: 325 to 450 kHz Load Match Transformer: 10 to 350 Ω, 7 taps Internal Reactive Match: Inductor available Maximum Reflected Power: 250 W Harmonics: At full rated power, all harmonics are > 50 dB below the fundamental output frequency Input Voltage: 180 to 253 VAC, 50/60 Hz, Single Phase Input Current: 15 ARMS max Maximum Output Voltage: 300 V Maximum Output Current: 6 A Regulatory Accuracy: 1% of set point or 2 W, whichever is greater.OEMモデルの説明
low-power series of mid-frequency power suppliesドキュメント
ドキュメントなし