概要（Overview）

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. It supports a wide variety of applications and accessories. The modular and flexible design allows to configure and individualize the system to match application requirements. With the System Integration for Measurement Accuracy (SIGMA™) kit, MPS150 can be seamlessly integrated with third-party instrumentation, ensuring the shortest signal path.