概要（Overview）

300 mm Semi-/Fully-automated Probe System. The CM300 offers measurement accuracy and reliability in a solution that is completely modular – whether it’s I-V/C-V, RTN and RF measurements in one semi-automated system, or a fully-automated dual-prober system that handles any combination of 200 mm and 300 mm wafers. With renowned Cascade Microtech precision measurement expertise, you can confidently deliver accurate and reliable data for current and evolving device technologies. By that the CM300 provides faster lifetime predictability in the reliability process, and less design iterations in the modeling process. Productivity and efficiency are increased with the ability to test over a wide temperature range, and to maintain probe-to-pad accuracy for testing on small pads down to 40 µm.