概要（Overview）

300 mm Semi-/ Fully-automated Probe System with Autonomous Silicon Photonics Measurement Assistant. The CM300xi-SiPh 300 mm probe station is the first verified integrated measurement solution on the market that enables engineering and production-proven, optimized optical measurements right after installation – without further development. Equipped with the unique Autonomous SiPh Measurement Assistant it provides a groundbreaking set of functions that precisely calibrate the optical positioning hardware to the probe station and verify the performance of the integrated system.