概要（Overview）

The PA200 Probe Station was designed to be a highly precise and flexible semi-automated test solution for wafers and substrates up to 200 mm. The PA200 gives you reliable probing and precise measurements on decreasing pad and feature sizes down to the submicron range. It is ideal for failure analysis (FA), RF and mm-wave applications up to 500 GHz, as well as for opto-engineering and MEMS tests.