説明

The ELECTROGLAS 1034 (EG 1034XA and EG 1034X-6A) Automatic Wafer Prober is a precision instrument for testing and classifying semiconductor devices in wafer form. The Model EG 1034X (EG 1034XA and EG 1034X-6A) is a self-contained system comprising two modules, a prober module and a power module. Both modules are designed for compact bench-top mounting; however, an interconnecting cable permits remote mounting of the power module when desired. The Electroglas 1034 Prober ( EG 1034XA and EG 1034X-6A) is designed for operational simplicity and fast wafer throughput. The unique ELECI’ROGLAS/XYNETICS solid-state high-speed X-Y Positioning System permits simplified wafer loading and unloading outside the probe ring area with high-speed travel to and from the load position. Simplified manual and semi-automatic controls assure rapid wafer alignment by automatic gross positioning, simplified theta alignment, and precise device alignment by use of a multi-function joystick that provides 20 different manual commands in a single control. The high-speed automatic probing cycle provides automatic indexing, probing and inking of all devices on the wafer under preprogrammed indexing control, and automatic return to the load position when probing is complete. The system accommodates up to 6-inch wafers and provides indexing in either English or metric system units.