概要（Overview）

The PA300 is an analytical prober conforming to EN 61010 - 1: 1993-04 which corresponds to UL 3101-1: 1993 and IEC 1010-1: 1992. By means of the PA300 electrical measurements on wafers and substrates up to a diameter of 300mm can be made. The only electrical connection to the measuring object is through the probecard, the probehead and the chuck.