説明
HG-CV System for EPI resistivity measurement構成
構成なしOEMモデルの説明
The SSM 5130 is a fully automatic mapping system that provides a variety of electrical characterization measurements for non-patterned wafers used in epitaxial silicon production and front-end semiconductor processing. Wafers are robotically loaded onto the mapping stage from a cassette or opened FOUP, and the test wafer moves to each site specified in a pre-programmed map as electrical characterization tests are made. The system stores test data and reports it in a variety of formats. The SSM 5130 eliminates the need for costly metal and poly deposition processes by using a pneumatically controlled, non-damaging probe design and a top-side mercury contact. With separate probe and chuck vacuum lines, the system features an extremely stable contact area and uses only a small quantity of mercury to make highly repeatable measurements for process development and process monitoring applications. Typical applications of the SSM 5130 include EPI resistivity, low-k dielectric constant, and oxide integrity. The SSM 5130 can handle wafer diameters from 200 mm to 300 mm, and offers single-site and multiple-site maps. Automatic face-up loading prevents wafer damage, and precision pressure regulators are used for Hg contact. The PROCAP software provides a full suite of measurements.ドキュメント
ドキュメントなし
SSM
5130
検証済み
カテゴリ
Probers
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
115139
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SSM
5130
カテゴリ
Probers
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
115139
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
HG-CV System for EPI resistivity measurement構成
構成なしOEMモデルの説明
The SSM 5130 is a fully automatic mapping system that provides a variety of electrical characterization measurements for non-patterned wafers used in epitaxial silicon production and front-end semiconductor processing. Wafers are robotically loaded onto the mapping stage from a cassette or opened FOUP, and the test wafer moves to each site specified in a pre-programmed map as electrical characterization tests are made. The system stores test data and reports it in a variety of formats. The SSM 5130 eliminates the need for costly metal and poly deposition processes by using a pneumatically controlled, non-damaging probe design and a top-side mercury contact. With separate probe and chuck vacuum lines, the system features an extremely stable contact area and uses only a small quantity of mercury to make highly repeatable measurements for process development and process monitoring applications. Typical applications of the SSM 5130 include EPI resistivity, low-k dielectric constant, and oxide integrity. The SSM 5130 can handle wafer diameters from 200 mm to 300 mm, and offers single-site and multiple-site maps. Automatic face-up loading prevents wafer damage, and precision pressure regulators are used for Hg contact. The PROCAP software provides a full suite of measurements.ドキュメント
ドキュメントなし