概要（Overview）

The Zeta-200 optical profiler takes advantage of a high-transmission optics design, backside illumination and proprietary algorithms to measure Patterned Sapphire Substrates (PSS). The system can accommodate a variety of PSS bump shapes, measuring the height and pitch of all PSS bumps in the field of view, thus avoiding false bump signatures or results skewed by measuring only a small area. With multi-mode optics, the system is also able to measure thin film thickness and sample bow during PSS manufacturing. Finally, with automated defect inspection, the Zeta-200 can identify defects such as missing bumps, scratches, and particles.