説明
CVD構成
CVDOEMモデルの説明
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.ドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
TRIAS SPA
検証済み
カテゴリ
CVD (Metalization)
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
15010
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / TOKYO ELECTRON
TRIAS SPA
検証済み
カテゴリ
CVD (Metalization)
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
15010
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
CVD構成
CVDOEMモデルの説明
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.ドキュメント
ドキュメントなし