説明

PVD

構成

· Factory Interface: 4.0 · (2) 25-wafer FOUP Loadports · PVD Endura Type Controller · PVD Endura Type Remote Generator Rack · Cryo Compressor · Thermo Neslab Heat Exchanger · Edwards iQDP80/IQMB250 pump systems for loadlock, system, and process chambers (pumps may not be included) · CE Mark WW Intro / 1st Sys Module Level Part Desc FI Top Top 5.3 FI FI Top Loadport (LP) N2 x2 FI Details FI Aligner High Friction FI Details S/W CGA SW / CGAfe only for Gen 4.0+ FI Details Server Gen 3.2.1 / Gen 4.0 (After 7/31/18) MF Top Top P4 MF w/ XP robots MF Details Motion control type eXMP MF Details Servo Driver Type ATD MF Details MF Robot Blade Opera2 Blades MF Details P4 SWLL Fast Vent Included MF Details MF ladder N/A SWLL Top Top MD SWLL SWLL Details Defect package Al Fins W/ Vespel Pins SWLL Details Pumping Dedicated pumping SWLL Details Cooling (pedestal) N/A Ch E Top Top Degas Ch E Details Pedestal Grooved Ch E Details Defect package Terminator (lift hoops & Celazole fingers) Ch E Details Lifter type Motorized lifts Ch F Top Top Degas Ch F Details Pedestal Grooved Ch F Details Defect package Terminator (lift hoops & Celazole fingers) Ch F Details Lifter type Motorized lifts Ch C Top Top Empty Ch D Top Top Empty Ch A Top Top Pass through Ch Ch A Details Pedestal Celazole Ch A Details Defect package WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified Ch A Details Lifter type Motorized lifts (Endura HRR) Ch A Details Pumping N/A Ch B Top Top Cool down Ch B Details Pedestal Celazole Ch B Details Defect package WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified Ch B Details Lifter type Motorized lifts (Endura HRR) Ch B Details Pumping WW 36' 2018: Dedicated pump Ch 1 Top Top Empty Ch 2 Top Top ALD Ch 2 Details Pedestal MCA Ch 2 Details MFC Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719. GF125 Fw 1.28 qualifiied on XDK719 Ch 2 Details Process Kit ALD2 TaN Ch 2 Details Lid type Six injector Lid Cap Ch 2 Details Gas Panel (# ampoule, # sticks) 1 - ampoule , 4 sticks; DMA gas stick Ch 2 Details Ampoule Type Std ampoule Ch 2 Details Misc Virtual Leak H/W Ch 3 Top Top ALD Ch 3 Details Pedestal MCA Ch 3 Details MFC Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719. GF125 Fw 1.28 qualifiied on XDK719 Ch 3 Details Process Kit ALD2 TaN Ch 3 Details Lid type Six injector Lid Cap Ch 3 Details Gas Panel (# ampoule, # sticks) 1 - ampoule , 4 sticks; DMA gas stick Ch 3 Details Ampoule Type Std ampoule Ch 3 Details Misc Virtual Leak H/W Ch 4 Top Top Empty Ch 5 Top Top N/A: No position 5 on P4 Remotes Top Cryo compressor IS-1000 MF Compressor (0190-54045) FTF Compliant Top FTF N Remotes Top Equipment Rack Type/ Qty Rev 3 / 1 Remotes Details Fuse Box SCCR 300 Amp Remotes Top CVD/ Siconi H/X Qty / Type 1 SMC H2000 (0190-53161) @ 60 Hz but also used at 50 Hz site. P/N: 0190-53162 for 50 Hz sites. Remotes Top DI Cooler 0190-54808