説明
説明なし構成
RF DC + Pulse DC / Ion etch device / RGA / Pinnacle 12kW DC + 10kW DC pulsed / Polycold / 2x KryoOEMモデルの説明
The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a whole host of new features that enhance productivity and reduce materials consumption. Whether its new oval cathode technology for reduced materials costs and particles, next generation magnet systems for enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and lowers production costs.ドキュメント
ドキュメントなし
EVATEC / BALZERS
LLS EVO II
検証済み
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
110924
ウェーハサイズ：
不明
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
LLS EVO II
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
110924
ウェーハサイズ：
不明
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
RF DC + Pulse DC / Ion etch device / RGA / Pinnacle 12kW DC + 10kW DC pulsed / Polycold / 2x KryoOEMモデルの説明
The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a whole host of new features that enhance productivity and reduce materials consumption. Whether its new oval cathode technology for reduced materials costs and particles, next generation magnet systems for enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and lowers production costs.ドキュメント
ドキュメントなし