説明
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.構成
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEMモデルの説明
提供なしドキュメント
ドキュメントなし
CELLO
OHMIKER-90BS (S006)
検証済み
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
47751
ウェーハサイズ：
不明
ヴィンテージ：
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CELLO
OHMIKER-90BS (S006)
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
47751
ウェーハサイズ：
不明
ヴィンテージ：
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.構成
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEMモデルの説明
提供なしドキュメント
ドキュメントなし