説明
Details Attached Metals/Chemicals used: LiCO, LiPON, and Li CATHODE DEPOSITION SYSTEM, DENTON VACUUM, CO. #100, DISCOVERY SERIES, 2010 VINTAGE, NO S/N PLATE, 12" CATHODE SPUTTERING WITH PLANETARY VACUUM LOAD LOCK AND ROBOT LOADING ASSEMBLIES, VEECO 5CM GRIDDED ION SOURCE WITH GAS CONTROLS, INCLUDES APPROX. 4' X 6' X 12" STAINLESS STEEL CHAMBER, VEECO/ION MILL, WITH ION TECH MDL. MPS-3000FC CONTROLLER, CTI CRYOGENICS HIGH VACUUM PUMP/BLANKET HEATER, MDL. TORR400 CRYOPUMP WITH OXFORD MDL. E500 DUAL TEMPERATURE MONITOR, KYKY TURBO MOLECULAR PUMP MDL. F400, WITH MDL. FV-III PUMP CONTROLLER, VAT GATE VALVE, VAT ADAPTIVE PRESSURE CONTROLLER, (4) ADVANCE ENERGY PINNACLE PLUS DC POWER SUPPLIES, ASSORTED PRESSURE MONITORS, ISOLATION VALVES, (4) 12" CATHODES, CTI-CRYOGENICS 9600 COMPRESSOR, EDWARDS PUMP STAND WITH EDWARDS MDL. 40-2 STAGE VACUUM PUMP AND EDWARDS MDL. 80-2 STAGE VACUUM PUMP WITH ROTARY LOBE BLOWER, LOAD LOCK LOADER WITH PLC CONTROLLER, STAND ALONE POWER SUPPLY/CONTROL, COMPUTER SYSTEM WITH RELATED HARDWARE/SOFTWARE, LOADER/UNLOADER WITH EPSON MDL. G6-453C ROBOT, MFG. 9/10, MOUNTED IN CABINET ON HEAVY DUTY STAND, ALL RELATED EQUIPMENT, COMPONENETS構成
12.0" sputtering system with planetary Load lock and robot loading asembliesOEMモデルの説明
提供なしドキュメント
カテゴリ
PVD / Sputtering
最終検証： 12日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131866
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
DISCOVERY
カテゴリ
PVD / Sputtering
最終検証： 12日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
131866
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available