説明
NEW PROGRAMMABLE HMI/PLC SYSTEM (MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES) NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES REBUILT DUAL STAGE MECHANICAL PUMP PROGRAMMABLE FEATURES INCLUDED: AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER POWER AND TIME SETTINGS FOR SPUTTER P/S FOR PROGRAM ON TOUCH SCREEN POWER AND TIME SETTINGS FOR ETCH P/S FOR PROGRAM ON TOUCH SCREEN MFC, CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE) MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
KDF / MRC
903M
カテゴリ
PVD / Sputtering
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125695
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
NEW PROGRAMMABLE HMI/PLC SYSTEM (MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES) NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES REBUILT DUAL STAGE MECHANICAL PUMP PROGRAMMABLE FEATURES INCLUDED: AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER POWER AND TIME SETTINGS FOR SPUTTER P/S FOR PROGRAM ON TOUCH SCREEN POWER AND TIME SETTINGS FOR ETCH P/S FOR PROGRAM ON TOUCH SCREEN MFC, CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE) MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし