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KLA / SPTS SIGMA fxP
    説明
    No missing parts
    構成
    It configures two PVD and one Etch chamber two PVD chambers , one Etch chamber , two Load Lock chambers ,one Transfer chamber Configuration(upper floor) 2 L/L(VCB), 1 Transfer Chamber, 2 Depo(Sputter), 1 Etch(HSE), 3 Controller Raack (AC Power, DC power Supply, Vacuum Cont, Controller) Down Floor 2 Cryo Compressor(CTI 9600), 4 Dry Pump(SDE90), 2 Chiller 470VAC Transformer, Failure ・L/L(VCB) Contrtoller VCB BàDoor Close failure and Switching from Rough to Turbo ・Etch CH(HSE)Controller à Switch to Depo A ESC for Depo A does not work but new spare ESC available. Broken parts (TMP for Loadlock chamber ,Transfer chamber)
    OEMモデルの説明
    The SPTS Sigma FxP is a physical vapor deposition (PVD) system for 4-12" power device manufacturing. Applications fo the SPTS Sigma FxP include frontside thick Al and thin wafer backside processing. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow. Sigma fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options). The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
    ドキュメント

    KLA / SPTS

    SIGMA fxP

    verified-listing-icon

    検証済み

    カテゴリ
    PVD / Sputtering

    最終検証: 60日以上前

    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    83892


    ウェーハサイズ:

    6"/150mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    同様のリスト
    すべて表示
    KLA / SPTS SIGMA fxP

    KLA / SPTS

    SIGMA fxP

    PVD / Sputtering
    ヴィンテージ: 0状態: 中古
    最終確認20日前

    KLA / SPTS

    SIGMA fxP

    verified-listing-icon
    検証済み
    カテゴリ
    PVD / Sputtering
    最終検証: 60日以上前
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    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    83892


    ウェーハサイズ:

    6"/150mm


    ヴィンテージ:

    不明


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    No missing parts
    構成
    It configures two PVD and one Etch chamber two PVD chambers , one Etch chamber , two Load Lock chambers ,one Transfer chamber Configuration(upper floor) 2 L/L(VCB), 1 Transfer Chamber, 2 Depo(Sputter), 1 Etch(HSE), 3 Controller Raack (AC Power, DC power Supply, Vacuum Cont, Controller) Down Floor 2 Cryo Compressor(CTI 9600), 4 Dry Pump(SDE90), 2 Chiller 470VAC Transformer, Failure ・L/L(VCB) Contrtoller VCB BàDoor Close failure and Switching from Rough to Turbo ・Etch CH(HSE)Controller à Switch to Depo A ESC for Depo A does not work but new spare ESC available. Broken parts (TMP for Loadlock chamber ,Transfer chamber)
    OEMモデルの説明
    The SPTS Sigma FxP is a physical vapor deposition (PVD) system for 4-12" power device manufacturing. Applications fo the SPTS Sigma FxP include frontside thick Al and thin wafer backside processing. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow. Sigma fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options). The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
    ドキュメント
    同様のリスト
    すべて表示
    KLA / SPTS SIGMA fxP

    KLA / SPTS

    SIGMA fxP

    PVD / Sputteringヴィンテージ: 0状態: 中古最終検証:20日前
    KLA / SPTS SIGMA fxP

    KLA / SPTS

    SIGMA fxP

    PVD / Sputteringヴィンテージ: 0状態: 中古最終検証:60日以上前