説明
PVD/Sputtering System構成
Details Attached Target;AL-Si Process Module: DEP A Station: STATION 3 Primary Utility: WATER PURGE MODULE UTILITY MAP (PRESSURE SWITCHES): S1: NOT USED S2: NOT USED S3: MANOMETER SHUT-OFF S4: DIFF CIRCUIT S5: CHAMBER ROUGH S6: HIVAC S7: THROTTLE S8: GAS MANIFOLD S9: GAS 1 S10: GAS 2 (OPTION) S11: GAS 3 (OPTION) S12: CHAMBER VENT S13: PLATEN COOLING S14: RGA SHUT-OFF S15: NOT USED S16: ESC Ar B.P. PUMP (OPTION) S17: ESC Ar B.P. WAFER (OPTION) S18: ESC Ar B.P. SUPPLY (OPTION) S19: SHUTTER S20: WATER S21: WAFER LIFT S22: NOT USED PNEUMATIC LAYOUT: S1-S6: DOOR 1 - DOOR 6 S7-S9: RESERVOIR; MODULE PUMP; DIFF PUMPING S10-S13: CASS 1 (SLOW PUMP, FAST PUMP, SLOW VENT, FAST VENT) S14-S17: CASS 2 (SLOW PUMP, FAST PUMP, SLOW VENT, FAST VENT) S18-S27: CHAMBER VENT; SPARE S28: MODULE HI-VAC SUPPLY Sensor: COMPRESSED AIR SENSOROEMモデルの説明
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD.ドキュメント
カテゴリ
PVD / Sputtering
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111803
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA / SPTS
SIGMA 200
カテゴリ
PVD / Sputtering
最終検証： 4日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
111803
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available