説明
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turbo構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
ULVAC
SIV-200
カテゴリ
PVD / Sputtering
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
128840
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turbo構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし